... exacerbated 恶化 excitation membrane 兴奋膜 expiratory center 呼气中枢 ...
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Finally, Si3N4 beam and Si reflecting membrane are selected with an integrated structure, using electrothermal excitation and piezoresistive detection.
依据分析结果，选择氮化硅作为梁材料，采用梁膜一体结构，激励和检测方式为电热激振、电阻拾振。
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